Size dependent pull-in instability of functionally graded microbeams using a finite element formulation

Abstract The size dependent static pull-in instability of functionally graded (FG) microbeams in micro-electromechanical systems (MEMS) is studied, considering the influence axial force. material properties are varied beam thickness by a power-law function, and they calculated rule mixture. To account for microsize effect, classical Euler-Bernoulli theory employed combination with modified couple stress to describe deformation. Based on Von Kármán nonlinear relationship, element derived establish discretized governing equation microbeams. Newton-Raphson iterative procedure adopted compute frequencies voltages microbeam clamped ends. Numerical result reveals that voltage increased increase exponent microscale parameter. effects distribution, force as well microstructural parameter FG investigated detail.